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Let $\{a_1, a_2, \dots, a_n\}$ be an integer sequence of length $n$ such that:

Let $S(N)$ be the number of such sequences with $a_n \le N$.
For example, $S(10) = 4$: $\{6\}$, $\{6, 8\}$, $\{6, 8, 9\}$ and $\{6, 10\}$.
We can verify that $S(100) = 482073668$ and $S(10\,000) \bmod 10^8 = 73808307$.

Find $S(20\,000\,000) \bmod 10^8$.

1 $\phi$ denotes Euler's totient function.

Solution
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